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    Please use this identifier to cite or link to this item: http://163.15.40.127/ir/handle/987654321/771


    Title: Sputtering (103) Oriented AlN Films and its Acoustic Wave Mode Analysis
    Authors: Wu, Sean;吳信賢;Ro, Ruyen;Lee, Maw-Shung;Lin, Zhi-Xun;(東方技術學院電子與資訊系)
    Contributors: (東方技術學院電子與資訊系)
    Keywords: Sputtering;AlN;(103) oriented;FBAR
    Date: 2007-03-08
    Issue Date: 2010-05-13 19:25:06 (UTC+8)
    Relation: Japan-Taiwan Workshop on Future Frequency Control Devices
    Appears in Collections:[Department of Electronics Engineering and Computer Science] conference

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