Bulk Acoustic Wave Analysis of Crystalline Plane Oriented ZnO Films

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题名:	Bulk Acoustic Wave Analysis of Crystalline Plane Oriented ZnO Films
作者:	吳信賢;Wu, Sean;Lin, Zhi-Xun;Lee, Maw-Shung;Ro, Ruyen;(東方技術學院電子與資訊系)
贡献者:	(東方技術學院電子與資訊系)
关键词:	Mechanical and acoustical properties;Acoustical properties of solids;Phonons in crystal lattices;Thin film structure and morphology
日期:	2007
上传时间:	2010-05-13 19:00:22 (UTC+8)
摘要:	Bulk acoustic wave (BAW) properties of piezoelectric layer are very important design parameters for film bulk acoustic wave resonator devices. In this research, BAW properties of all crystalline plane oriented sputtered and epitaxial ZnO films were analyzed theoretically. The (002), (004), and (006) oriented ZnO films provided a pure longitudinal mode. The (100), (110), (200), (210), (300), and (220) oriented ZnO films provided a pure fast shear mode. The (101), (102), (103), (112), (201), (202), (104), (203), (211), (114), (212), (105), (204), (213), (302), (205), (106), and (214) oriented ZnO films provided a quasilongitudinal mode and a quasishear mode. Those bulk acoustic wave properties can be used for further device design and application.
關聯:	Journal of Applied Physics, Vol.102 no.8
显示于类别:	[電子與資訊系(遊戲動畫系、動畫科)] 期刊論文

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