Bulk Acoustic Wave Analysis of Crystalline Plane Oriented ZnO Films

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Title:	Bulk Acoustic Wave Analysis of Crystalline Plane Oriented ZnO Films
Authors:	吳信賢;Wu, Sean;Lin, Zhi-Xun;Lee, Maw-Shung;Ro, Ruyen;(東方技術學院電子與資訊系)
Contributors:	(東方技術學院電子與資訊系)
Keywords:	Mechanical and acoustical properties;Acoustical properties of solids;Phonons in crystal lattices;Thin film structure and morphology
Date:	2007
Issue Date:	2010-05-13 19:00:22 (UTC+8)
Abstract:	Bulk acoustic wave (BAW) properties of piezoelectric layer are very important design parameters for film bulk acoustic wave resonator devices. In this research, BAW properties of all crystalline plane oriented sputtered and epitaxial ZnO films were analyzed theoretically. The (002), (004), and (006) oriented ZnO films provided a pure longitudinal mode. The (100), (110), (200), (210), (300), and (220) oriented ZnO films provided a pure fast shear mode. The (101), (102), (103), (112), (201), (202), (104), (203), (211), (114), (212), (105), (204), (213), (302), (205), (106), and (214) oriented ZnO films provided a quasilongitudinal mode and a quasishear mode. Those bulk acoustic wave properties can be used for further device design and application.
Relation:	Journal of Applied Physics, Vol.102 no.8
Appears in Collections:	[Department of Electronics Engineering and Computer Science] journal

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