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    Please use this identifier to cite or link to this item: http://163.15.40.127/ir/handle/987654321/376


    Title: The influence of varied sputtering condition on piezoelectric coefficients of A1N thin films
    Authors: 高國陞;Kao, Kuo-Sheng;Chung, Chung-Jen;Chen, Ying-Chung;Ou, Tien-Fan;Shing, Tai-Kang;(東方技術學院電子與資訊系)
    Contributors: 東方技術學院電子與資訊系
    Keywords: aluminum nitride;piezoelectric coefficient;periodic compression force
    Date: 2004-08-23
    Issue Date: 2009-11-27 10:04:23 (UTC+8)
    Relation: 2004 14th IEEE International Symposium on Applications of Ferroelectrics—ISAF-04
    Appears in Collections:[Department of Electronics Engineering and Computer Science] conference

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