Acoustic Wave Properties of (100) AIN Films

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题名:	Acoustic Wave Properties of (100) AIN Films
作者:	Wu, Sean Lin, Zhi-Xun Ro, Ruyen 吳信賢 (東方技術學院電子與資訊系)
贡献者:	東方技術學院電子與資訊系
日期:	2009-05-25
上传时间:	2014-04-18 14:29:57 (UTC+8)
出版者:	臺北市：國立臺灣大學
摘要:	AlN films have been widely investigated for the application in surface acoustic wave (SAW) and films bulk acoustic wave (FBAW) devices. (100) AlN films have been deposited, but there is few research to study their acoustic properties. Different orientation piezoelectric films will form different acoustic properties. Bulk acoustic wave (BAW) and SAW properties of (100) AlN films were theoretically analyzed in this research. As regards the BAW properties, (100) AlN films can excite a pure shear mode (velocity=5867 m/s, K2=2.45%) and exhibited a great potential for FBAR liquid biosensors. As regards the Rayleigh SAW modes of (100) AlN films on diamond, especial for mode 1, the phase velocity is 10474 m/s and the K2 is 2.31 % at the films thickness ratio (h/l) is 0.3. (100) AlN films on diamond also can excite high velocity shear horizontal (SH) SAW modes. Especial for mode 0, the K2 curve shows a maximum value (1.27%) at h/l=0.28 and the velocity is 7496 m/s. Those research results provide an important theoretical basis for further application on FBAW and SAW devices
關聯:	2009 IUTAW Symposium on Recent Advances of Acoustic Waves in Splids (IS-RAAWS), pp.409-414 IUTAW Symposium on Recent Advances of Acoustic Waves in Splids
显示于类别:	[電子與資訊系(遊戲動畫系、動畫科)] 會議論文

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