Acoustic Wave Properties of (100) AIN Films

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Please use this identifier to cite or link to this item: http://163.15.40.127/ir/handle/987654321/1653

Title:	Acoustic Wave Properties of (100) AIN Films
Authors:	Wu, Sean Lin, Zhi-Xun Ro, Ruyen 吳信賢 (東方技術學院電子與資訊系)
Contributors:	東方技術學院電子與資訊系
Date:	2009-05-25
Issue Date:	2014-04-18 14:29:57 (UTC+8)
Publisher:	臺北市：國立臺灣大學
Abstract:	AlN films have been widely investigated for the application in surface acoustic wave (SAW) and films bulk acoustic wave (FBAW) devices. (100) AlN films have been deposited, but there is few research to study their acoustic properties. Different orientation piezoelectric films will form different acoustic properties. Bulk acoustic wave (BAW) and SAW properties of (100) AlN films were theoretically analyzed in this research. As regards the BAW properties, (100) AlN films can excite a pure shear mode (velocity=5867 m/s, K2=2.45%) and exhibited a great potential for FBAR liquid biosensors. As regards the Rayleigh SAW modes of (100) AlN films on diamond, especial for mode 1, the phase velocity is 10474 m/s and the K2 is 2.31 % at the films thickness ratio (h/l) is 0.3. (100) AlN films on diamond also can excite high velocity shear horizontal (SH) SAW modes. Especial for mode 0, the K2 curve shows a maximum value (1.27%) at h/l=0.28 and the velocity is 7496 m/s. Those research results provide an important theoretical basis for further application on FBAW and SAW devices
Relation:	2009 IUTAW Symposium on Recent Advances of Acoustic Waves in Splids (IS-RAAWS), pp.409-414 IUTAW Symposium on Recent Advances of Acoustic Waves in Splids
Appears in Collections:	[Department of Electronics Engineering and Computer Science] conference

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