The (103)-oriented aluminum nitride (AIN) thin film is an attractive piezoelectric material for the applications in surface acoustic wave and film bulk acoustic wave resonator devices. In this work, we repot structural and mechanical sputtering powers at 150, 250, and 350W. Comparisons were made on their crystalline structures with X-ray different, surface morphologies with atomic force microscopy, mechanical properties with nanoindentation, and tribological responses with nanoscratch. Results indicate that for the sputtering power of 350W, a high-quality (103) AIN thin film, whose hardness is 18.91 ± 1.03GPa and Young’s modulus is 242.26 ± 8.92GPa, was obtained with the most compact surface condition.
