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    Please use this identifier to cite or link to this item: http://163.15.40.127/ir/handle/987654321/922


    Title: Influence of Substrate Temperature to Prepare (103) oriented AlN Films
    Authors: Lin, Zhi-Xun;Wu, Sean;吳信賢;Lee, Maw-Shung;Ro, Ruyen;Yu, Jian-Shuo;Tsai, Jenn-Kai;Liu, Kuan-Ting;(東方技術學院電子與資訊系)
    Contributors: 東方技術學院電子與資訊系
    Keywords: AlN;(103) oriented;SAW;FBAR
    Date: 2008-07-13
    Issue Date: 2010-10-08 09:55:08 (UTC+8)
    Relation: THE 4TH INTERNATIONAL CONFERENCE ON TECHNOLOGICAL ADVANCES OF THIN FILMS & SURFACE COATINGS
    Appears in Collections:[Department of Electronics Engineering and Computer Science] conference

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