CONTROL OF (002) AND (103) PREFERENTIAL ORIENTATION OF ALN SPUTTERED FILMS

TFIR > Department of Electronics Engineering and Computer Science > conference > Item 987654321/920

Please use this identifier to cite or link to this item: http://163.15.40.127/ir/handle/987654321/920

Title:	CONTROL OF (002) AND (103) PREFERENTIAL ORIENTATION OF ALN SPUTTERED FILMS
Authors:	Lin, Zhi-Xun;Wu, Sean;吳信賢;Lee, Maw-Shung;Ro, Ruyen;Yu, Jian-Shuo;Hsieh, Chin-Tang;(東方技術學院電子與資訊系)
Contributors:	東方技術學院電子與資訊系
Keywords:	AIN;(103) oriented;SAW;FBAR
Date:	2008-06-22
Issue Date:	2010-10-08 09:51:00 (UTC+8)
Relation:	The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies
Appears in Collections:	[Department of Electronics Engineering and Computer Science] conference

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