CRYSTALLINE STRUCTURE AND SURFACE MORPHOLOGY OF (103) ORIENTATION AIN SPUTTERED FILMS

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Title:	CRYSTALLINE STRUCTURE AND SURFACE MORPHOLOGY OF (103) ORIENTATION AIN SPUTTERED FILMS
Authors:	Lee, Maw-Shung Lin, Zhi-Xun Wu, Sean 吳信賢 Weng, Min-Hang Cheng, Da-Long (東方技術學院電子與資訊系)
Contributors:	東方技術學院電子與資訊系
Keywords:	AIN;(103) oriented;SAW;FBAR
Date:	2008-08
Issue Date:	2010-10-08 09:49:26 (UTC+8)
Relation:	The 6th Asian Meeting on Ferroelectrics (AMF-6)
Appears in Collections:	[Department of Electronics Engineering and Computer Science] conference

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