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    Please use this identifier to cite or link to this item: http://163.15.40.127/ir/handle/987654321/780


    Title: Influence of Nitrogen Concentrations for Sputtering (103) Oriented AlN Films on Silicon Substrate
    Authors: Lin, Zhi-Xun;Wu, Sean;吳信賢;Lee, Maw-Shung;Chen, Kang-I;陳剛毅;Chen, Guo-Ju;Chang, Yee Shin;(東方技術學院電子與資訊系)
    Contributors: (東方技術學院電子與資訊系)
    Date: 2007-07-01
    Issue Date: 2010-05-13 19:42:25 (UTC+8)
    Relation: International Conference on Materials for Advanced Technologies (ICMAT)
    Appears in Collections:[Department of Electronics Engineering and Computer Science] conference

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