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    Please use this identifier to cite or link to this item: http://163.15.40.127/ir/handle/987654321/765


    Title: Bulk Acoustic Wave Modes Analysis of the (103) AlN Films
    Authors: Wu, Sean;吳信賢;Lin, Zhi-Xun;Lee, Maw-Shung;Ro, Ruyen;Jiang, Jiann-Sheng;江鑑聲;(東方技術學院電子與資訊系)
    Contributors: (東方技術學院電子與資訊系)
    Keywords: AlN;(103) oriented;quasi fast shear mode
    Date: 2006-11-24
    Issue Date: 2010-05-13 19:14:35 (UTC+8)
    Relation: 2006年中國材料科學學會
    Appears in Collections:[Department of Electronics Engineering and Computer Science] conference

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