Surface Acoustic Wave Device on (ZnO/LGS) Substrate

TUNG FANG Institutional Repository > 電子與資訊系(遊戲動畫系、動畫科) > 會議論文 > Item 987654321/764

請使用永久網址來引用或連結此文件: http://163.15.40.127/ir/handle/987654321/764

題名:	Surface Acoustic Wave Device on (ZnO/LGS) Substrate
作者:	Wu, Sean;吳信賢;Yan, Guo-Jun;Lee, Maw-Shung;Ro, Ruyen;Chen, Kang-I;陳剛毅;(東方技術學院電子與資訊系)
貢獻者:	(東方技術學院電子與資訊系)
關鍵詞:	Langasite;ZnO;c-axis-oriented;reactive rf magnetron sputtering
日期:	2006-11-24
上傳時間:	2010-05-13 19:12:12 (UTC+8)
摘要:	C-axis-oriented and fine structural ZnO films were successfully prepared on Langasite substrate(LGS, La3Ga5SiO14) by rf magnetron sputtering. The crystalline of the films was determined by grazing incident angle X-ray diffraction (XRD), the surface microstructure of films was investigated by Scanning electron microscop(SEM) and the atom composition ratio O/Zn of films was determined by Energy Dispersive X-ray Spectroscopy (EDS). Different RF powers (100W, 150W and 200W) were used to deposit the films. The results showed the films prepared in the research were all polycrystalline hexagonal ZnO films. The optimal ZnO films prepared at the RF powers(200W) had the highly c-axis-oriented microstructures, dense surface morphology, best composition ratio (0.99) and the film thickness was 1.44 μm. Surface acoustic wave (SAW) measurement was used to evaluate the acoustic properties of this new composite substrate (ZnO/LGS). ZnO films on LGS can effectively enhance the SAW electromechanical coupling coefficient value.
關聯:	2006年中國材料科學學會
顯示於類別:	[電子與資訊系(遊戲動畫系、動畫科)] 會議論文

文件中的檔案:

沒有與此文件相關的檔案.

在TFIR中所有的資料項目都受到原著作權保護.

TAIR相關文章

資料載入中.....