Sputtering ZnO films on langasite and its SAW properties

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题名:	Sputtering ZnO films on langasite and its SAW properties
作者:	Wu, Sean 吳信賢 Yan, Guo-Jun Lee, Maw-Shung Ro, Ruyen Chen, Kang-I 陳剛毅 (東方技術學院電子與資訊系)
贡献者:	(東方技術學院電子與資訊系)
日期:	2007-12
上传时间:	2010-05-13 19:08:12 (UTC+8)
摘要:	C-axis-oriented ZnO films were sputtered on Langasite substrate (LGS, La(3)Ga(5)SiO(14)). The crystalline structure of the films was determined by grazing incident angle X-ray diffraction, the surface microstructure of films was investigated by scanning electron microscopy and atomic force microscopy, the atom composition ratio O/Zn of films was determined by energy dispersive X-ray spectroscopy, and the resistivity of films was determined by the four-point probe instrument. The measurement results showed those films prepared were all polycrystalline hexagonal ZnO films. By analyzing the microstructure of the ZnO films, those prepared at the oxygen flow rate (O(2)/O(2)+Ar) of 20%, the RF power of 200 W, and the substrate temperature of 200 degrees C had the best performance: highly c-axis-oriented microstructures, dense surface morphology, and the atom composition ratio 1.02. The measured scattering parameters of the SAW device fabricated on the composite substrate (ZnO/LGS) with film thickness 1.76 microm showed an average shifted velocity around 2741 m/s at 57.1 MHz and a electromagnetic coupling coefficient greater than 1%.
關聯:	IEEE Transactions on Ultrasonics Ferroelectrics Frequency Control, Vol.54 no.12, pp.2456-2461
显示于类别:	[電子與資訊系(遊戲動畫系、動畫科)] 會議論文

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