| Abstract: | Bulk acoustic wave analysis of all crystalline-plane-oriented AlN films were studied in this research. Different crystalline-plane-oriented AlN films will form different vibration modes and acoustic properties. (002)-, (004)-, and (006)-oriented AlN films provided a pure longitudinal mode. (100)-, (110)-, (200)-, (210)-, and (300)-oriented AlN films provided a pure fast shear mode. (101)-, (102)-, (103)-, (112)-, (201)-, (202)-, (104)-, (203)-, (211)-, (114)-, (212)-, (105)-, (204)-, (213)-, (302)-, (205)-, (106)-, and (214)-oriented AlN films provided a quasi-longitudinal mode and a quasi-shear mode. These bulk acoustic wave properties can be used for further device design and application. |
