Composite Substrate Material for Surface Acoustic Wave Oscillator

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題名:	Composite Substrate Material for Surface Acoustic Wave Oscillator
作者:	吳信賢 Wu, Sean 陳永欽 Chen, Yeong-Chin Lee, Maw-Shung (東方技術學院電子與資訊系)
貢獻者:	東方技術學院電子與資訊系
關鍵詞:	Sputtering;AlN;Y-128° LiNbO3;TCF;oscillator
日期:	2003-03
上傳時間:	2010-01-05 15:20:28 (UTC+8)
摘要:	Surface acoustic-wave (SAW) oscillators have advantageous features compared with other technologies. The Y-128° LiNbO3 is a well-known, high electromechanical-coupling SAW material, but its usefulness is limited because of its poor temperature-stability property. The AlN films have some excellent characteristics, such as high SAW velocity, stable chemical properties, and high-temperature stability. In this research, different thickness AlN films were sputtered on Y-128° LiNbO3 to be a composite substrate for the SAW oscillator. As AlN film thickness increased, the temperature coefficient of frequency (TCF) value of the oscillator varied from −76.32 ppm/°C to −28.81 ppm/°C giving an improvement in the TCF of 62.25%. The oscillator frequency at 25°C also varied from 40.0909 MHz to 41.6221 MHz, giving an improvement in the oscillator frequency of 3.8%. The composite substrate (AlN/Y-128° LiNbO3) can enhance the oscillator frequency and effectively improve the poor temperature stability for the SAW oscillator.
關聯:	Journal of Electronic Materials, Vol.32 no.3, pp.191-194 0361-5235 (Print) 1543-186X (Online)
顯示於類別:	[電子與資訊系(遊戲動畫系、動畫科)] 期刊論文

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