Effects of roughness on rarefied gas flow in long microtubes

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Title:	Effects of roughness on rarefied gas flow in long microtubes
Authors:	陳明達;Chen, Ming-Da;(東方技術學院化工與材料工程系)
Contributors:	東方技術學院化工與材料工程系
Date:	2002-12-18
Issue Date:	2009-12-29 15:59:36 (UTC+8)
Abstract:	In this paper, we propose a model that describes the behavior of rarefied gas flow in long microtubes. The inner surface is modeled as an annulus porous film pressed on an impermeable surface. The appropriate slip-flow boundary conditions (the high-order slip-flow model; Weng C-I et al 1999 Nanotechnology 10 373) and the proper porous flow model (the Brinkman-extended Darcy model; Li W-L and H Wang C-C 1999 J. Phys. D: Appl. Phys. 32 1421) are utilized in the core gas region and annulus porous region, respectively. Moreover, utilizing the matched conditions (velocity slip and stress continuity) at the gas/porous interface, we derive the governing equation of pressure distribution in long microtubes. We discuss the effects of pressure drop (Pin − Pout), roughness and gas rarefaction on the pressure distribution and velocity distributions of long microtubes. Moreover, the analytical solution of the pressure distribution for the first-order slip-flow model is obtained. The present results are valuable for the design and analysis of fluid flow in microelectromechanical systems.
Relation:	Journal of Micromechanics and Microengineering, Vol.12, pp.149-156
Appears in Collections:	[Department of Chemical and Materials Engineering] journal

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