Surface Acoustic Wave Device on (A1N/LGS) Substrate

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Title:	Surface Acoustic Wave Device on (A1N/LGS) Substrate
Authors:	吳信賢 Wu, Sean Lin, Zhi-Xun Lee, Maw-Shung (東方技術學院電子與資訊系)
Keywords:	Langasite, AIN, reactive RF magnetron sputtering
Date:	2006
Issue Date:	2009-08-20 14:11:00 (UTC+8)
Abstract:	Langasite (La_3Ga_5SiO_(14) or abbreviated as LGS) single crystal is an attractive substrate for surface acoustic wave (SAW) devices requiring good temperature stability and higher electromechanical coupling constant than quartz. A1N thin films are attractive materials that have some excellent characteristics, such as high SAW velocity, piezoelectricity, high-temperature stability, and stable chemical properties. In this study, AIN thin films were deposited on LGS to be a new composite SAW substrate (AIN/LGS) by reactive RF magnetron sputtering method. SAW delay-line device was manufactured on this substrate. The performance of the device was measured by network analyzer (Agilent 8753E).The results exhibited the composite substrate (AIN/LGS) increased the Rayleigh wave velocity, decreased the insertion loss of SAW devices, and suppressed the harmonic response.
Relation:	IUMRS-ICA-2006
Appears in Collections:	[Department of Electronics Engineering and Computer Science] conference

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