Surface acoustic wave characteristics and electromechanical coupling coefficient of lead zirconate titanate thin films

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题名:	Surface acoustic wave characteristics and electromechanical coupling coefficient of lead zirconate titanate thin films
作者:	Hsiao, Yu-Jen;Fang, Te-Hua;Chang, Yen-Hwei;Chang, Yee-Shin;吳信賢;Wu, Sean;(東方技術學院電子與資訊系)
日期:	2006-05
上传时间:	2009-08-20 13:41:09 (UTC+8)
摘要:	Lead zirconate titanate (PZT) thin films were created on ST-X quartz using radio frequency magnetron sputtering deposition. PZT films deposited on quartz are used as a new piezoelectric substrate for surface acoustic wave (SAW) devices. Microelectromechanical technique was used to fabricate interdigital transducers on the surface of the substrate to be used as a SAW delay line device. The results show that the PZT film was successfully deposited on ST-X quartz, and that the PZT film on ST-X quartz can enhance the electromechanical coupling coefficients of SAW.
關聯:	Materials letters, Vol.60 no.9-10, pp.1140-1143
显示于类别:	[電子與資訊系(遊戲動畫系、動畫科)] 期刊論文

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