矽基板上成長(100)取向之氧化鋅薄膜

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Title:	矽基板上成長(100)取向之氧化鋅薄膜
Authors:	丁盟芳吳信賢李茂順周文南 (東方設計學院電子與資訊系)
Contributors:	東方設計學院電子與資訊系
Keywords:	射頻磁控濺鍍 (100)取向氧化鋅剪向模態
Date:	2010-11
Issue Date:	2015-07-14 14:03:45 (UTC+8)
Publisher:	高雄縣大樹鄉：義守大學
Relation:	99年中國材料科學學會年會論文摘要集 2010 MRS-T ANNUAL MEETING 中國材料科學學會年會
Appears in Collections:	[Department of Electronics Engineering and Computer Science] conference

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