超高壓電係數之C軸取向氮化鈧鋁薄膜應用於鑽石表面聲波元件之研究

TFIR > Department of Electronics Engineering and Computer Science > conference > Item 987654321/1900

Please use this identifier to cite or link to this item: http://163.15.40.127/ir/handle/987654321/1900

Title:	超高壓電係數之C軸取向氮化鈧鋁薄膜應用於鑽石表面聲波元件之研究
Authors:	吳孟穎宋人豪黃肇瑞宋健民吳信賢李丁福 (東方設計學院電子與資訊系)
Contributors:	東方設計學院電子與資訊系
Keywords:	氮化鋁壓電係數鑽石表面聲波濾波器
Date:	2010-11
Issue Date:	2015-07-14 14:01:59 (UTC+8)
Publisher:	高雄縣大樹鄉：義守大學
Relation:	99年中國材料科學學會年會論文摘要集，頁179 2010 MRS-T ANNUAL MEETING 中國材料科學學會年會
Appears in Collections:	[Department of Electronics Engineering and Computer Science] conference

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