製備無極性M平面氮化鋁薄膜於矽基板之研究

TFIR > Department of Electronics Engineering and Computer Science > conference > Item 987654321/1899

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Title:	製備無極性M平面氮化鋁薄膜於矽基板之研究
Authors:	Wu, Sean Lin, Zhi-Xum 吳信賢林志勳 (東方設計學院電子與資訊系)
Contributors:	東方設計學院電子與資訊系
Keywords:	無極性 M平面氮化鋁薄膜
Date:	2010-12-10
Issue Date:	2015-07-14 13:59:35 (UTC+8)
Publisher:	彰化縣：明道大學
Relation:	台灣鍍膜科技學協會年會暨國科會專題計畫研究成果發表會會議手冊&論文摘要集台灣鍍膜科技學協會年會國科會專題計畫研究成果發表會 TACT-2010
Appears in Collections:	[Department of Electronics Engineering and Computer Science] conference

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