鑽石基板上成長(100)晶向之氮化鋁薄膜

TFIR > Department of Electronics Engineering and Computer Science > conference > Item 987654321/1657

Please use this identifier to cite or link to this item: http://163.15.40.127/ir/handle/987654321/1657

Title:	鑽石基板上成長(100)晶向之氮化鋁薄膜
Authors:	吳信賢黃肇瑞宋健民林久勝宋人豪鍾世賓 (東方技術學院電子與資訊系)
Contributors:	東方技術學院電子與資訊系
Keywords:	射頻磁控濺鍍鑽石基板 (100)晶向氮化鋁
Date:	2009-11-26
Issue Date:	2014-04-18 14:36:20 (UTC+8)
Publisher:	花蓮縣壽豐鄉：國立東華大學
Relation:	中國材料科學學會年會論文摘要集 98年中國材料科學學會論文摘要集 2009 MRS-T annual meeting 中國材料科學學會年會
Appears in Collections:	[Department of Electronics Engineering and Computer Science] conference

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