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Please use this identifier to cite or link to this item:
http://163.15.40.127/ir/handle/987654321/1651
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Title: | Surface Acoustic Wave Device Properties of (B, Al)N Film 128° Y-X LiNbO3 Substrate |
Authors: | Song, Jen-Hao Huang, Jow-Lay Wu, Sean Wang, Sheng-Chang Ruan, Jian-Long Lii, Ding-Fwu 吳信賢 (東方技術學院電子與資訊系) |
Contributors: | 東方技術學院電子與資訊系 |
Date: | 2010-09 |
Issue Date: | 2014-04-18 14:27:21 (UTC+8) |
Abstract: | A c-axis orientated aluminium nitride (AlN) film on a 128° Y- X lithium niobate (LiNbO 3) surface acoustic wave (SAW) device which exhibit a large electromechanical coupling coefficient ( k2) and a high SAW velocity property, is needed for future communication applications. In this study, a c-axis orientated (B, Al)N film (with 2.6 at.% boron) was deposited on a 128° Y- X LiNbO 3 substrate by a co-sputtering system to further boost SAW device properties. The XRD and TEM results show that the (B, Al)N films show highly aligned columns with the c-axis perpendicular to the substrate. The hardness and Young's modulus of (B, Al)N film on 128° Y- X LiNbO 3 substrates are at least 17% and 7% larger than AlN films, respectively. From the SAW device measurement, the operation frequency characteristic of (B, Al)N film on 128° Y- X LiNbO 3 is higher than pure AlN on it. The SAW velocity also increases as (B, Al)N film thickness increases (at fixed IDT wavelength). Furthermore, the k2 of (B, Al)N on the IDT/128° Y- X LiNbO 3 SAW device shows a higher value than AlN on it. |
Relation: | Applied Surface Science,Vol.256 no.23, pp.7156-7159 |
Appears in Collections: | [Department of Electronics Engineering and Computer Science] journal
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