Rayleigh and Shear Horizontal Surface Acoustic Properties of (100) ZnO Film on Silicon

TUNG FANG Institutional Repository > 電子與資訊系(遊戲動畫系、動畫科) > 期刊論文 > Item 987654321/1646

jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://163.15.40.127/ir/handle/987654321/1646

题名:	Rayleigh and Shear Horizontal Surface Acoustic Properties of (100) ZnO Film on Silicon
作者:	Wu, Sean Lin, Zhi-Xun RO, Ruyen Lee, Maw-Shung 吳信賢 (東方技術學院電子與資訊系)
贡献者:	東方技術學院電子與資訊系
日期:	2010-05
上传时间:	2014-04-18 14:18:12 (UTC+8)
摘要:	(100) ZnO films on silicon will excite Rayleigh SAWs along the z-axis and shear horizontal (SH) SAWs along the y-axis. Rayleigh SAW modes of (100) ZnO films on silicon have smaller film thickness ratios, higher phase velocities, and larger electromechanical coupling coefficient (K2) than the those of (002) ZnO films on silicon. This is special for Rayleigh mode 1, where the K2 curve shows a maximum value of 3.37% at h/Â¿ = 0.28 and the velocity is 5258 m/s. This is special for SH mode 0, where the K2 curve shows a maximum value of 3.3% at h/Â¿ = 0.28 and the velocity is 3242 m/s
關聯:	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol.57 no.5, pp.1237-1236
显示于类别:	[電子與資訊系(遊戲動畫系、動畫科)] 期刊論文

文件中的档案:

没有与此文件相关的档案.

检视Licence

在TFIR中所有的数据项都受到原著作权保护.

TAIR相关文章