新世代無線通訊關鍵零組件，以壓電薄膜為主要製程之固態微型共振器 (SMR)，其具有應用頻率高、體積小、品質因素高、高功率承受的能力、可與 IC 製程整合的特性，使其備受矚目。本計畫為整合型計畫”固態微型共振器及其應用”之一子計畫，其研究目的主要為建立固態微型共振器之電腦輔助設計方法與發展 其重要應用振盪器電路。本計畫執行期限為兩年，第一年發展固態微型共振器之電腦輔助設計模型，進行元件設計與共振器特性模擬，並研究設計參數與製程變數對 共振器特性之影響。第二年之主要工作將配合子計畫一第二年共振器製作成果，進行固態微型振盪器設計與電路製作，並對振盪器之特性進行量測分析。The Solid-mounted resonator (SMR) is a key component of the wireless circuits. The film bulk acoustic wave resonator (FBAR) filter based on the piezoelectric thin films have some excellent properties, such as high frequency, small volume, high power capability and compatible with IC process. This project is a sub-project of the chief project "Solid-mounted resonator and its application". The purpose of the project is developing the computer-aid design method of SMR and researching the applications on oscillator. This project will run in the two years. The first year, the computer-aid design method of SMR will be developed and simulate the properties of SMR. Next year, we will design a SMR oscillator of 2 GHz and manufacture it. The SMR oscillator properties will be measured and studied.
