Al-doped zinc oxide (AZO) films were deposited on glass substrstrates by using a RF magnetron sputtering system. The structural, electrical and optical properties of deposited are influenced by substrate temperature. X-ray diffraction measurements have shown that AZO films are highly c-axis oriented at low substrate temperature. Films with higher transmission and lower resistivity are obtained for the samples fabricated at higher substrate temperature. The optimal condition for deposition of AZO film with the lowest resistivity of 9.66x10-4 Ωcm, and a transmission toward 85% in the visible region was obtained at all substrate temperature.
關聯:
The Sixth China International Conference on High-Performance Ceramics programme Book and Abstracts 2009 China International Conference on High Performance Ceramic (CICC-6)
