Propagation Characteristics of Surface Acoustic Waves in AIN/ 128°Y-X LiNbO3 Structures

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Title:	Propagation Characteristics of Surface Acoustic Waves in AIN/ 128°Y-X LiNbO3 Structures
Authors:	Ro, Ruyen Lee, Wu, Sean Ruyen Lin, Zhi-Xun Lee, Maw-Shung 吳信賢 (東方技術學院電子與資訊系)
Contributors:	東方技術學院電子與資訊系
Date:	2009-04
Issue Date:	2012-11-06 16:05:36 (UTC+8)
Abstract:	In this study, propagation characteristics of surface acoustic waves in a layered piezoelectric structure (AIN/128°Y-X LiNbO3) and/or thin metal films deposited at various interfaces are calculated numerically. The effects of the polarity of 128°Y-X LiNbO3 on SAW characteristics are illustrated. The calculated phase velocity and coupling coefficient of SAWs in the IDT/ZnO/128°Y-X LiNbO3 structure are also demonstrated for comparison. The simulation results obtained in this study can be applied to the design of SAW devices using AIN/128°Y-X LiNbO3 structures.
Relation:	Japanese Journal of Applied Physics, Vol.48 no.8, pp. 085501
Appears in Collections:	[Department of Electronics Engineering and Computer Science] journal

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