Rayleigh surface acoustic wave modes of interdigital transducer/(100) AIN/(111) diamond

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Title:	Rayleigh surface acoustic wave modes of interdigital transducer/(100) AIN/(111) diamond
Authors:	管理者2,圖書館
Date:	2008-09
Issue Date:	2012-11-06 15:57:45 (UTC+8)
Abstract:	In this research, Rayleigh surface acoustic wave (SAW) modes of interdigital transducer (IDT)/(100) AlN/(111) diamond were theoretically analyzed and exhibited some excellent acoustic properties. Those Rayleigh SAW modes have smaller film thickness ratios (h/λ) , higher phase velocities, and larger electromechanical coupling coefficients (K2) than the ones of IDT/(002) AlN/(111) diamond. Especially for mode 1, the phase velocity is 10 474 m / s , the K2 is 2.31%, and the film thickness ratio (h/λ) is 0.3. The research results exhibit that IDT/(100) AlN/(111) diamond has some excellent properties and provides a predictable and theoretical basis for further application in high velocity SAW devices.
Relation:	Journal of Applied Physics, Vol.104 no.6, pp. 064919
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