(100) zinc oxide (ZnO) films were combined with (111) diamond to be a composite high velocity surface acoustic wave (SAW) substrate. Rayleigh SAW modes of (100) ZnO films on (111) diamond were theoretically analyzed. Those Rayleigh SAW modes have smaller films thickness ratios (h/λ), higher phase velocities, and larger electromechanical coupling coefficients (K2) than the ones of (002) ZnO films on (111) diamond. The research results provide a predictable and theoretical basis for further application on the high velocity SAW devices.
