Surface Acoustic Wave Properties of (100)AIN films on Diamond with different IDT position

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Title:	Surface Acoustic Wave Properties of (100)AIN films on Diamond with different IDT position
Authors:	Lin, Zhi-Xun Wu, Sean Ro, Ruyen Lee, Maw-Shung 吳信賢 (東方技術學院電子與資訊系)
Contributors:	東方技術學院電子與資訊系
Date:	2009-06
Issue Date:	2012-10-25 14:24:40 (UTC+8)
Abstract:	(100)AlN films have better surface acoustic wave (SAW) properties than (002) AlN films. In this research, (100) AlN films were combined with diamonds as a new composite SAW substrate. The SAW properties of (100) AlN films on diamonds were analyzed with 4 composite structures: interdigital transducer (IDT)/(100)AlN/diamond, (100)AlN/IDT/diamond, IDT/(100)AlN/metal/diamond, and metal/IDT/(100) AlN/diamond, and they exhibited some excellent SAW properties. Our research results provide a predictable and theoretical basis for further application on high-velocity SAW devices.
Relation:	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control., Vol.59 no.6, pp.1246-1251
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