Rayleigh surface acoustic wave modes of interdigital transducer/(100) AIN/(111) diamond

TFIR > Department of Electronics Engineering and Computer Science > journal > Item 987654321/1354

Please use this identifier to cite or link to this item: http://163.15.40.127/ir/handle/987654321/1354

Title:	Rayleigh surface acoustic wave modes of interdigital transducer/(100) AIN/(111) diamond
Authors:	Wu, Sean Ro, Ruyen Lin, Zhi-Xun Lee, Maw-Shung 吳信賢 (東方技術學院電子與資訊系)
Contributors:	東方技術學院電子與資訊系
Date:	2008-09
Issue Date:	2012-10-25 14:23:23 (UTC+8)
Abstract:	In this research, Rayleigh surface acoustic wave (SAW) modes of interdigital transducer (IDT)/(100) AlN/(111) diamond were theoretically analyzed and exhibited some excellent acoustic properties. Those Rayleigh SAW modes have smaller film thickness ratios (h/λ) , higher phase velocities, and larger electromechanical coupling coefficients (K2) than the ones of IDT/(002) AlN/(111) diamond. Especially for mode 1, the phase velocity is 10 474 m / s , the K2 is 2.31%, and the film thickness ratio (h/λ) is 0.3. The research results exhibit that IDT/(100) AlN/(111) diamond has some excellent properties and provides a predictable and theoretical basis for further application in high velocity SAW devices.
Relation:	Journal of Applied Physics, Vol.104 no.6
Appears in Collections:	[Department of Electronics Engineering and Computer Science] journal

Files in This Item:

File	Description	Size	Format
index.html		0Kb	HTML	910	View/Open

View Licence