表面聲波(SAW)振盪器比起其它振盪器技術具有比較優越的特性，鈮酸鋰
(Y-128° LiNbO3 )是一種高機電耦合的表面聲波(SAW)材料，廣泛的被使用於表面
聲波元件，由於氮化鋁薄膜有許多極佳的特性，像高表面聲波(SAW)速度、穩定的化學特性和高溫下的穩定性，在這個研究中，在鈮酸鋰(Y-128° LiNbO3 ) 上，濺鍍高C 軸優選取向的氮化鋁薄膜做為表面聲波(SAW)振盪器之複合基板，研究發現此複合基板(AlN/Y-128° LiNbO3 )，比只用鈮酸鋰(Y-128° LiNbO3 )基板的表面聲波(SAW)振盪器，有較高的振盪頻率及較低的相位雜訊，研究顯示此複合基板(AlN/ Y-128° LiNbO3)對應用在表面聲波(SAW)振盪器，是很好的材料。Surface acoustic wave (SAW) oscillators have advantageous features compared with other technologies. Y-128° LiNbO3 is the well-known high electromechanical coupling surface acoustic wave (SAW) material. AlN films have some excellent characteristics, such as high SAW velocity, stable chemical properties, and high-temperature stability. In this research, highly c-axis-oriented AlN films were sputtered on Y-128° LiNbO3 to be a composite substrate for the SAW oscillator applications. As AlN film added, the SAW oscillator has a higher oscillator frequency and a lower phase noise than the ones using Y-128° LiNbO3 substrate alone. It exhibited the composite substrate (AlN/Y-128° LiNbO3) is good for SAW oscillator applications.
